Modulation of Structural, Electronic, and Optical Properties of Titanium Nitride Thin Films by Regulated In Situ Oxidation
- Award ID(s):
- 1719875
- NSF-PAR ID:
- 10411625
- Date Published:
- Journal Name:
- ACS Applied Materials & Interfaces
- Volume:
- 15
- Issue:
- 3
- ISSN:
- 1944-8244
- Page Range / eLocation ID:
- 4733 to 4742
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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