Towards a CMOS-Compatible Accelerometer Using Self-Powered TENG System
- Award ID(s):
- 1919608
- PAR ID:
- 10417892
- Date Published:
- Journal Name:
- 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)
- Page Range / eLocation ID:
- 192 to 194
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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