This content will become publicly available on July 1, 2024
- Award ID(s):
- 1856662
- NSF-PAR ID:
- 10420159
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 41
- Issue:
- 4
- ISSN:
- 0734-2101
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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