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Abstract Particle contamination due to plasma processing motivates the design of a method of electrically lifting particles in a time interval after a plasma’s power is turned off. Small solid dust particles have electric charges that are not frozen until a late stage of the plasma afterglow. Beyond that time, before they fall to a surface below and cause defects, particles can be lifted in a controlled manner by applying an appropriate direct-current (DC) electric field, as we demonstrate experimentally. A few milliseconds after an argon plasma’s capacitively coupled radio-frequency power is switched off, a vertical DC electric field is applied. Thereafter, video imaging shows that the falling of the particles is slowed or stopped altogether, depending on the magnitude of the upward electric force.
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3D tracking of particles in a dusty plasma by laser sheet tomography
The collective behavior of levitated particles in a weakly ionized plasma (dusty plasma) has raised significant scientific interest. This is due to the complex array of forces acting on the particles and their potential to act as in situ diagnostics of the plasma environment. Ideally, the three-dimensional (3D) motion of many particles should be tracked for long periods of time. Typically, stereoscopic imaging using multiple cameras combined with particle image velocimetry is used to obtain a velocity field of many particles, yet this method is limited by its sample volume and short time scales. Here, we demonstrate a different, high-speed tomographic imaging method capable of tracking individual particles. We use a scanning laser sheet coupled to a single high-speed camera. We are able to identify and track tens of individual particles over centimeter length scales for several minutes, corresponding to more than 10 000 frames.
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- Award ID(s):
- 2010524
- PAR ID:
- 10432148
- Date Published:
- Journal Name:
- Physics of Plasmas
- Volume:
- 30
- Issue:
- 6
- ISSN:
- 1070-664X
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1063/5.0147458
