Sivasubramanian, Chandrasekhar Komaralingam, Dodge, Robert, Ramani, Aditya, Bayba, David, Janakiram, Mani, Butcher, Eric, Gonzales, Joseph, and Pedrielli, Giulia. DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography. Retrieved from https://par.nsf.gov/biblio/10433196. Journal of Systems Science and Systems Engineering 32.3 Web. doi:10.1007/s11518-023-5564-x.

Sivasubramanian, Chandrasekhar Komaralingam, Dodge, Robert, Ramani, Aditya, Bayba, David, Janakiram, Mani, Butcher, Eric, Gonzales, Joseph, & Pedrielli, Giulia. DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography. Journal of Systems Science and Systems Engineering, 32 (3). Retrieved from https://par.nsf.gov/biblio/10433196. https://doi.org/10.1007/s11518-023-5564-x

Sivasubramanian, Chandrasekhar Komaralingam, Dodge, Robert, Ramani, Aditya, Bayba, David, Janakiram, Mani, Butcher, Eric, Gonzales, Joseph, and Pedrielli, Giulia. "DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography". Journal of Systems Science and Systems Engineering 32 (3). Country unknown/Code not available. https://doi.org/10.1007/s11518-023-5564-x. https://par.nsf.gov/biblio/10433196.

@article{osti_10433196,
place = {Country unknown/Code not available}, title = {DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography}, url = {https://par.nsf.gov/biblio/10433196}, DOI = {10.1007/s11518-023-5564-x}, abstractNote = {}, journal = {Journal of Systems Science and Systems Engineering}, volume = {32}, number = {3}, author = {Sivasubramanian, Chandrasekhar Komaralingam and Dodge, Robert and Ramani, Aditya and Bayba, David and Janakiram, Mani and Butcher, Eric and Gonzales, Joseph and Pedrielli, Giulia}, }