This work reports an engineered platform for the non-contact haptic stimulation on human skins by means of an array of piezoelectric micromachined ultrasonic transducer (pMUT) via the beamforming scheme. Compared to the state-of-art reports, three distinctive achievements have been demonstrated: (1) individual single pMUT unit based on lithium niobate (LN) with measured high SPL (sound pressure level) of 133 dB at 2 mm away; (2) a beamforming scheme simulated and experimentally proved to generate ~2.3x higher pressure near the focal point; and (3) the combination of auto-positioning and haptic stimulations on volunteers with the smallest reported physical device size to achieve haptic sensations. As such, this work could have practical applications in the broad areas to stimulate haptic sensations, such as AR (Augmented Reality), VR (Virtual Reality), and robotics.
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This content will become publicly available on June 26, 2024
HIGH-SPL PMUT ARRAY FOR MID-AIR HAPTIC INTERFACE
This paper presents a mid-air haptic interface device enabled by a piezoelectric micromachined ultrasonic transducer (pMUT) array achieving an unprecedentedly high transmission pressure of 2900 Pa at a 15 mm distance for the first time. The structure is based on sputtered potassium sodium niobate (K,Na)NbO3 (KNN) thin film with a high piezoelectric coefficient (𝑒𝑒31 ~ 8-10 C/m2). A prototype KNN pMUT array composed of 15×15 dual-electrode circular-shape diaphragms exhibits a resonant frequency around 92.4 kHz. Testing results show a transmitting sensitivity of 120.8 Pa/cm2 per volt under only 12 Vp-p excitation at the natural focal point of 15 mm away, which is at least 3 times that of previously reported AlN pMUTs at a similar frequency. Furthermore, an instant non-contact haptic stimulation of wind-like sensation on human palms has been realized. As such, this work sheds light on a new class of pMUT array with high acoustic output pressure for human-machine interface applications, such as consumer electronics and AR/VR systems.
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- Award ID(s):
- 2128311
- NSF-PAR ID:
- 10435874
- Date Published:
- Journal Name:
- 22th International Conference on Solid-State Sensors, Actuators and Microsystems-Transducers 2023
- Page Range / eLocation ID:
- 124-127
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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