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This paper reports a new 2D surface-micromachined optical ultrasound transducer (SMOUT) array consisting of 350 × 350 elements with highly uniform optical and acoustic performances. Each SMOUT element consists of a vacuum-sealed Fabry-Perot (F-P) interferometric cavity formed by two parallel partially reflective distributed Bragg reflectors (DBRs). Optical mapping in the 4 cm × 4 cm center region of the SMOUT array shows that the optical resonance wavelength (ORW) of > 94% of the elements falls within a narrow range of ≤ 10 nm. The center frequency, acoustic bandwidth and noise equivalent pressure (NEP) of the elements are determined to be 5 MHz, 5 MHz, and 20.7 Pa (with 16 times of signal averaging) or 172.5 Pa (without averaging) over a bandwidth of 10 MHz, respectively. The temperature and temporal stability of the SMOUT elements is also tested, which shows there is little variation in their ORW under large ambient temperature fluctuation and during continuous water immersion. To demonstrate its imaging capability, 2D and 3D PACT based on the SMOUT array is also conducted within a 3 cm × 3 cm field of view (FOV) at a depth of 3cm with no interrogation wavelength tuning. These results show that the SMOUT array could overcome some of the major limitations in existing ultrasound transducer arrays for PACT and provide a promising solution for achieving high-speed 3D imaging.
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High-frequency surface-micromachined optical ultrasound transducer array for 3D micro photoacoustic computed tomography
This Letter reports a new, to the best of our knowledge, high-frequency surface-micromachined optical ultrasound transducer (HF-SMOUT) array for micro photoacoustic computed tomography (µPACT). An 11 × 11 mm22D array of 220 × 220 elements (35 µm in diameter) is designed, fabricated, and characterized. The optical resonance wavelength (ORW) of ≥90% of the elements falls within a 6-nm range. The acoustic center frequency and bandwidth of the elements are ∼14 MHz and ∼18 MHz (129%), respectively. The noise equivalent pressure (NEP) is 161 Pa (or 18 mPa/Hz) within a measurement bandwidth of 5–75 MHz. The standard deviation of the ORW drift is 0.45 nm and 0.93 nm within 25°C−55°C, respectively, and during a seven-day continuous water immersion. PACT experiments are conducted to evaluate the imaging performances of the HF-SMOUT array. The spatial resolution is estimated as 90 µm (axial) and 250–750 µm (lateral) within a 10 × 10 mm2field of view (FoV) and the imaging depth of 16 mm. A 3D PA image of a knotted black hair target is also successfully acquired. These results demonstrate the feasibility of using the HF-SMOUT array for µPACT applications.
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- PAR ID:
- 10492062
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Letters
- Volume:
- 49
- Issue:
- 5
- ISSN:
- 0146-9592; OPLEDP
- Format(s):
- Medium: X Size: Article No. 1181
- Size(s):
- Article No. 1181
- Sponsoring Org:
- National Science Foundation
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