- Award ID(s):
- 2129796
- PAR ID:
- 10438814
- Editor(s):
- Piyawattanametha, Wibool; Park, Yong-Hwa; Zappe, Hans
- Date Published:
- Journal Name:
- PROCEEDINGS SPIE OPTO, MOEMS and Miniaturized Systems XXII
- Volume:
- 12434
- Page Range / eLocation ID:
- 1243402
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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