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Title: Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride
The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index ( n  = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength of 1525 nm. A beam width of 6.3° has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity [negligible two-photon absorption (TPA)], wide transparency window, and CMOS compatibility.  more » « less
Award ID(s):
2023730
PAR ID:
10440233
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Optics Letters
Volume:
48
Issue:
3
ISSN:
0146-9592
Page Range / eLocation ID:
807
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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