Bending and folding techniques such as origami and kirigami enable the scale‐invariant design of 3D structures, metamaterials, and robots from 2D starting materials. These design principles are especially valuable for small systems because most micro‐ and nanofabrication involves lithographic patterning of planar materials. Ultrathin films of inorganic materials serve as an ideal substrate for the fabrication of flexible microsystems because they possess high intrinsic strength, are not susceptible to plasticity, and are easily integrated into microfabrication processes. Here, atomic layer deposition (ALD) is employed to synthesize films down to 2 nm thickness to create membranes, metamaterials, and machines with micrometer‐scale dimensions. Two materials are studied as model systems: ultrathin SiO2and Pt. In this thickness limit, ALD films of these materials behave elastically and can be fabricated with fJ‐scale bending stiffnesses. Further, ALD membranes are utilized to design micrometer‐scale mechanical metamaterials and magnetically actuated 3D devices. These results establish thin ALD films as a scalable basis for micrometer‐scale actuators and robotics.
Developing small‐scale, lightweight, and flexible devices with integrated microactuators is one of the critical challenges in wearable haptic devices, soft robotics, and microrobotics. In this study, a novel fabrication process that leverages the benefits of 3D printing with two‐photon polymerization and flexible printed circuit boards (FPCBs) is presented. This method enables flexible microsystems with 3D‐printed electrostatic microactuators, which are demonstrated in a flexible integrated micromirror array and a legged microrobot with a mass of 4 mg. 3D electrostatic actuators on FPCBs are robust enough to actuate the micromirrors while the device is deformed, and they are easily integrated with off‐the‐shelf electronics. The crawling robot is one of the lightest legged microrobots actuated without external fields, and the legs actuated with 3D electrostatic actuators enable a locomotion speed of 0.27 body length per second. The proposed fabrication framework opens up a pathway toward a variety of highly integrated flexible microsystems.
more » « less- NSF-PAR ID:
- 10441447
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Functional Materials
- Volume:
- 33
- Issue:
- 47
- ISSN:
- 1616-301X
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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