skip to main content
US FlagAn official website of the United States government
dot gov icon
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
https lock icon
Secure .gov websites use HTTPS
A lock ( lock ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

Explore Research Products in the PAR
It may take a few hours for recently added research products to appear in PAR search results.


  • NSF Public Access
  • Search Results
  • Gas-assisted femtosecond pulsed laser machining: A high-throughput alternative to focused ion beam for creating large, high-resolution cross sections
Title: Gas-assisted femtosecond pulsed laser machining: A high-throughput alternative to focused ion beam for creating large, high-resolution cross sections
Cross sectioning is a critical sample preparation technique used in a wide range of applications, that enables investigation of buried layers and subsurface features or defects. State-of-the-art cross-sectioning methods, each have their own pros and cons, but generally suffer from a tradeoff between throughput and accuracy. Mechanical methods are fast but lack accuracy. On the other hand, ion-based methods, such as focused ion beam (FIB), offer high resolutions but are slow. Lasers, which can potentially improve this tradeoff, face multiple challenges that include creation of heat affected zones (HAZs), undesirably large spot size as well as material redeposition. In this work, we utilized, for the first time, a femtosecond pulsed laser, which has been shown to cause minimal to zero HAZ, for rapid creation of large cross sections that are comparable with FIB cross sections in quality. The laser was integrated with a targeted CO 2 gas delivery system for redeposition control and beam tail curtailing, and a hard mask for top surface protection and further shrinkage of the effective spot size. The performance of the proposed system is showcased through real world examples that compare the throughput and quality resulted from the laser and FIB cross sectioning techniques.  more » « less
Award ID(s):
1916756
PAR ID:
10442653
Author(s) / Creator(s):
; ; ; ; ;
Editor(s):
Devaraj, Arun
Date Published:
Journal Name:
PLOS ONE
Volume:
18
Issue:
5
ISSN:
1932-6203
Page Range / eLocation ID:
e0285158
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
  1. ; ; ; ; ; (, Scientific Reports)
    Abstract Acquiring detailed 3D images of samples is needed for conducting thorough investigations in a wide range of applications. Doing so using nondestructive methods such as X-ray computed tomography (X-ray CT) has resolution limitations. Destructive methods, which work based on consecutive delayering and imaging of the sample, face a tradeoff between throughput and resolution. Using focused ion beam (FIB) for delayering, although high precision, is low throughput. On the other hand, mechanical methods that can offer fast delayering, are low precision and may put the sample integrity at risk. Herein, we propose to use femtosecond laser ablation as a delayering method in combination with optical and confocal microscopy as the imaging technique for performing rapid 3D imaging. The use of confocal microscopy provides several advantages. First, it eliminates the 3D image distortion resulting from non-flat layers, caused by the difference in laser ablation rate of different materials. It further allows layer height variations to be maintained within a small range. Finally, it enables material characterization based on the processing of material ablation rate at different locations. The proposed method is applied on a printed circuit board (PCB), and the results are validated and compared with the X-ray CT image of the PCB part. 
    more » « less
  2. ; ; ; ; ; ; ; (, Advanced Optical Materials)
    Abstract Shaping the intensity profile of a laser beam is desired by various industrial applications. In this paper, a new approach is presented to design and fabricate liquid crystal (LC) micro‐optical elements (MOEs) with engineered Pancharatnam–Berry (PB) phases for beam shaping. By generalizing the Snell's law for spatially variant PB phases, molecular orientation patterns are designed for the liquid crystal MOEs to shape a Gaussian laser beam into flattop intensity profiles with circular and square cross‐sections, with the β parameter varied from 4 to 42. It is demonstrated that such liquid crystal beam shaping MOEs can be fabricated with high throughput and high resolution by using a photopatterning technique based on plasmonic metamasks and that they produce excellent beam quality, no zero‐order light leakage with a beam size from 10 to 600 µm. As the plasmonic metamasks allow for encoding arbitrary molecular orientations, i.e., arbitrary geometric phase profiles, the approaches presented here are widely applicable to large‐scale manufacturing of liquid crystal MOEs for any beam shapes. 
    more » « less
  3. ; ; ; (, THE HAMLYN SYMPOSIUM ON MEDICAL ROBOTICS)
    Lasers are an essential tool in modern medical practice, and their applications span a wide spectrum of specialties. In laryngeal microsurgery, lasers are frequently used to excise tumors from the vocal folds [1]. Several research groups have recently developed robotic systems for these procedures [2-4], with the goal of providing enhanced laser aiming and cutting precision. Within this area of research, one of the problems that has received considerable attention is the automatic control of the laser focus. Briefly, laser focusing refers to the process of optically adjusting a laser beam so that it is concentrated in a small, well-defined spot – see Fig. 1. In surgical applications, tight laser focusing is desirable to maximize cutting efficiency and precision; yet, focusing can be hard to perform manually, as even slight variations (< 1 mm) in the focal distance can significantly affect the spot size. Motivated by these challenges, Kundrat and Schoob [3] recently introduced a technique to robotically maintain constant focal distance, thus enabling accurate, consistent cutting. In another study, Geraldes et al. [4] developed an automatic focus control system based on a miniaturized varifocal mirror, and they obtained spot sizes as small as 380 μm for a CO2 laser beam. Whereas previous work has mainly dealt with the problem of creating – and maintaining – small laser spots, in this paper we propose to study the utility of defocusing surgical lasers. In clinical practice, physicians defocus a laser beam whenever they wish to change its effect from cutting to heating – e.g., to thermally seal a blood vessel [5]. To the best of our knowledge, no previous work has studied the problem of robotically regulating the laser focus to achieve controlled tissue heating, which is precisely the contribution of the present manuscript. In the following sections, we first briefly review the dynamics of thermal laser-tissue interactions and then propose a controller capable of heating tissue according to a prescribed temperature profile. Laser-tissue interactions are generally considered hard to control due to the inherent inhomogeneity of biological tissue [6], which can create significant variability in its thermal response to laser irradiation. In this paper, we use methods from nonlinear control theory to synthesize a temperature controller capable of working on virtually any tissue type without any prior knowledge of its physical properties. 
    more » « less
  4. ; ; (, Physical Chemistry Chemical Physics)
    In femtosecond (fs) 4D ultrafast electron microscopy (UEM), a tradeoff is made between photoelectrons per packet and time resolution. One consequence of this can be longer-than-desirable acquisition times for low-density packets, and particularly for low repetition rates when complete photothermal dissipation is required. Thus, gaining an understanding of photoelectron trajectories in the gun region is important for identifying factors that limit collection efficiency (CE; fraction of photoelectrons that enter the illumination system). Here, we continue our work on the systematic study of photoelectron trajectories in the gun region of a Thermo Fisher/FEI Tecnai Femto UEM, focusing specifically on CE in the single-electron regime. Using General Particle Tracer, calculated field maps, and the exact architecture of the Tecnai Femto UEM, we simulated the effects of fs laser parameters and key gun elements on CE. The results indicate CE strongly depends upon the laser spot size on the source, the (unbiased) Wehnelt aperture diameter, and the incident photon energy. The CE dispersion with laser spot size is found to be strongly dependent on aperture diameter, being nearly dispersionless for the largest apertures. A gun crossover is also observed, with the beam-waist position being dependent on the aperture diameter, further illustrating that the Wehnelt aperture acts as a simple, fixed electrostatic lens in UEM mode. This work provides further insights into the operational aspects of fs 4D UEM. 
    more » « less
  5. ; ; ; (, International Conference on Machine Learning)
    Generative models have enabled the creation of contents that are indistinguishable from those taken from nature. Open-source development of such models raised concerns about the risks of their misuse for malicious purposes. One potential risk mitigation strategy is to attribute generative models via fingerprinting. Current fingerprinting methods exhibit a significant tradeoff between robust attribution accuracy and generation quality while lacking design principles to improve this tradeoff. This paper investigates the use of latent semantic dimensions as fingerprints, from where we can analyze the effects of design variables, including the choice of fingerprinting dimensions, strength, and capacity, on the accuracy-quality tradeoff. Compared with previous SOTA, our method requires minimum computation and is more applicable to large-scale models. We use StyleGAN2 and the latent diffusion model to demonstrate the efficacy of our method. 
    more » « less
  • Citation Formats
  • MLA
  • APA
  • Chicago
  • BibTeX
  • Save / Share this Record
  • Send to Email