As 6G wireless communications push the operation frequency above 110 GHz, it is critical to have low-loss interconnects that can be accurately tested. To this end, D-band (110 GHz to 170 GHz) substrate-integrated waveguides (SIWs) are designed on a 100-μm-thick SiC substrate. The fabricated SIWs are probed on-wafer in a single sweep from 70 kHz to 220 GHz with their input/output transitioned to grounded coplanar waveguides (GCPWs). From CPW-probed scattering parameters, two-tier calibration is used to de-embed the SIW-GCPW transitions and to extract the intrinsic SIW characteristics. In general, the record low loss measured agrees with that obtained from finite-element full-wave electromagnetic simulation. For example, across the D band, the average insertion loss is approximately 0.2 dB/mm, which is several times better than that of coplanar or microstrip transmission lines fabricated on the same substrate. A 3-pole filter exhibits a 1-dB insertion loss at 135 GHz with 20-dB selectivity and 11% bandwidth, which is order-of-magnitude better than typical on-chip filters. These results underscore the potential of using SIWs to interconnect transistors, filters, antennas, and other circuit elements on the same monolithically integrated chip.
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A Compact F-band Filter Based on SiC Substrate-integrated Waveguides
F-band substrate-integrated waveguides (SIWs)
are designed, fabricated, and characterized on a SiC wafer,
along with SIW-based filters, impedance standards, and
transitions to grounded coplanar waveguides (GCPWs). The
GCPW-SIW transitions not only facilitate wafer probing, but
also double as resonators to form a 3-pole band-pass filter
together with an SIW resonator. The resulted filter exhibits a
1.5-dB insertion loss at 115 GHz with a 34-dB return loss and a
19-GHz (16%) 3-dB bandwidth. The size of the filter is only 63%
of previous filters comprising three SIW resonators. These
results show the feasibility for monolithic integration of highquality
filters with high-efficiency antennas and amplifiers in a
single-chip RF frontend above 110 GHz, which is particularly
advantageous for 6G wireless communications and nextgeneration
automobile radars.
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- PAR ID:
- 10442664
- Publisher / Repository:
- IEEE
- Date Published:
- ISBN:
- 978-1-6654-9418-2
- Subject(s) / Keyword(s):
- cavity resonator microwave filters millimeter wave integrated circuits semiconductor waveguides
- Format(s):
- Medium: X
- Location:
- Taipei, Taiwan
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
-
Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1109/APMC57107.2023.10439892
