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Title: On the performance of PVDF based piezoelectric sensor with microstructures
This paper aims to investigate the performance of piezoelectric sensors with different shapes of 3D-printed microstructures. Based on the numerical analysis in the time-frequency domain, the microstructures are printed directly on the PVDF transparent film exhibiting higher piezoelectric coefficients using a high-resolution two-photon polymerization method. Bi-directional gold IDTs are fabricated by sputtering gold onto the substrate surface using a 3D-printed stencil. The mechanical properties of the film and surface morphology of printed microstructures are examined using a nanoindenter and a 3D profilometer. The change in frequency response due to the microstructure is measured using a network analyzer. This study will be a reference for developing an efficient wave-based gas sensor with enhanced sensitivity.  more » « less
Award ID(s):
2018853 2229155
NSF-PAR ID:
10476238
Author(s) / Creator(s):
; ; ;
Editor(s):
Su, Zhongqing; Limongelli, Maria Pina; Glisic, Branko
Publisher / Repository:
SPIE
Date Published:
Page Range / eLocation ID:
53
Format(s):
Medium: X
Location:
Long Beach, United States
Sponsoring Org:
National Science Foundation
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