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Title: Ultra-Efficient Foundry-Fabricated Resonant Modulators with Thermal Undercut
We demonstrate highly efficient vertical junction microdisk modulators with selective substrate undercut in a 300 mm CMOS foundry. The devices achieve record thermo-optic efficiency for sub-5µm radius, enabling next-generation low-energy, highly-parallel DWDM links.  more » « less
Award ID(s):
1747426
PAR ID:
10479886
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ;
Publisher / Repository:
Optica Publishing Group
Date Published:
ISBN:
978-1-957171-25-8
Page Range / eLocation ID:
SF2K.6
Format(s):
Medium: X
Location:
San Jose, CA
Sponsoring Org:
National Science Foundation
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