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Title: Electron kinetics in a positive column of AC discharges in a dynamic regime
Abstract

We have performed hybrid kinetic-fluid simulations of a positive column in alternating current (AC) argon discharges over a range of driving frequenciesfand gas pressurepfor the conditions when the spatial nonlocality of the electron energy distribution function (EEDF) is substantial. Our simulations confirmed that the most efficient conditions of plasma maintenance are observed in the dynamic regime when time modulations of mean electron energy (temperature) are substantial. The minimal values of the root mean square electric field and the electron temperature have been observed atf/pvalues of about 3 kHz Torr−1in a tube of radiusR= 1 cm. The ionization rate and plasma density reached maximal values under these conditions. The numerical solution of a kinetic equation allowed accounting for the kinetic effects associated with spatial and temporal nonlocality of the EEDF. Using thekineticenergy of electrons as an independent variable, we solved an anisotropic tensor diffusion equation in phase space. We clarified the role of different flux components during electron diffusion in phase space over surfaces of constanttotalenergy. We have shown that the kinetic theory uncovers a more exciting and rich physics than the classical ambipolar diffusion (Schottky) model. Non-monotonic radial distributions of excitation rates, metastable densities, and plasma density have been observed in our simulations atpR >6 Torr cm. The predicted off-axis plasma density peak in the dynamic regime has never been observed in experiments so far. We hope our results stimulate further experimental studies of the AC positive column. The kinetic analysis could help uncover new physics even for such a well-known plasma object as a positive column in noble gases.

 
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Award ID(s):
2148653
NSF-PAR ID:
10490419
Author(s) / Creator(s):
;
Publisher / Repository:
Plasma Source Science and Technology
Date Published:
Journal Name:
Plasma Sources Science and Technology
Volume:
32
Issue:
8
ISSN:
0963-0252
Page Range / eLocation ID:
085017
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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