This work reports a three-dimensional polymer interdigitated pillar electrostatic actuator that can produce force densities 5–10× higher than those of biological muscles. The theory of operation, scaling, and stability is investigated using analytical and FEM models. The actuator consists of two high-density arrays of interdigitated pillars that work against a restoring force generated by an integrated flexure spring. The actuator architecture enables linear actuation with higher displacements and pull-in free actuation to prevent the in-use stiction associated with other electrostatic actuators. The pillars and springs are 3D printed together in the same structure. The pillars are coated with a gold–palladium alloy layer to form conductive electrodes. The space between the pillars is filled with liquid dielectrics for higher breakdown voltages and larger electrostatic forces due to the increase in the dielectric constant. We demonstrated a prototype actuator that produced a maximum work density of 54.6 µJ/cc and an electrical-to-mechanical energy coupling factor of 32% when actuated at 4000 V. The device was operated for more than 100,000 cycles with no degradation in displacements. The flexible polymer body was robust, allowing the actuator to operate even after high mechanical force impact, which was demonstrated by operation after drop tests. As it is scaled further, the reported actuator will enable soft and flexible muscle-like actuators that can be stacked in series and parallel to scale the resulting forces. This work paves the way for high-energy density actuators for microrobotic applications.
This content will become publicly available on September 15, 2024
Insects perform feats of strength and endurance that belie their small stature. Insect-scale robots—although subject to the same scaling laws—demonstrate reduced performance because existing microactuator technologies are driven by low–energy density power sources and produce small forces and/or displacements. The use of high–energy density chemical fuels to power small, soft actuators represents a possible solution. We demonstrate a 325-milligram soft combustion microactuator that can achieve displacements of 140%, operate at frequencies >100 hertz, and generate forces >9.5 newtons. With these actuators, we powered an insect-scale quadrupedal robot, which demonstrated a variety of gait patterns, directional control, and a payload capacity 22 times its body weight. These features enabled locomotion through uneven terrain and over obstacles.
more » « less- Award ID(s):
- 1830924
- NSF-PAR ID:
- 10491298
- Publisher / Repository:
- Science
- Date Published:
- Journal Name:
- Science
- Volume:
- 381
- Issue:
- 6663
- ISSN:
- 0036-8075
- Page Range / eLocation ID:
- 1212 to 1217
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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