Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors
- PAR ID:
- 10503681
- Author(s) / Creator(s):
- ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; more »
- Publisher / Repository:
- Nature Nanotechnology
- Date Published:
- Journal Name:
- Nature Nanotechnology
- Volume:
- 18
- Issue:
- 9
- ISSN:
- 1748-3387
- Page Range / eLocation ID:
- 1044 to 1050
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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