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Title: Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors
Award ID(s):
2309043 2039351 1539916
NSF-PAR ID:
10503681
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; more » ; « less
Publisher / Repository:
Nature Nanotechnology
Date Published:
Journal Name:
Nature Nanotechnology
Volume:
18
Issue:
9
ISSN:
1748-3387
Page Range / eLocation ID:
1044 to 1050
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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