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Title: Three-dimensional integration of two-dimensional field-effect transistors
Award ID(s):
2039351 2042154
PAR ID:
10504516
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
Springer Nature
Date Published:
Journal Name:
Nature
Volume:
625
Issue:
7994
ISSN:
0028-0836
Page Range / eLocation ID:
276 to 281
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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