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Title: Design, fabrication, and characterization of large metalenses
This work demonstrates the utility of a design, fabrication, and testing loop on 10 mm diameter metalenses to accelerate large-scale production of flat optics. By enabling rapid measurement and analysis of metalenses, it is possible to identify differences between designed performance and as-built performance quickly and correlate those to process characteristics. This accelerated feedback between the design, fabrication, and testing is expected to enable higher yields of better-performing metalenses.  more » « less
Award ID(s):
1822049 2310640 2310681 1822026
PAR ID:
10517977
Author(s) / Creator(s):
; ; ;
Editor(s):
Fan, Jonathan A; Chang-Hasnain, Connie J; Zhou, Weimin
Publisher / Repository:
SPIE
Date Published:
Journal Name:
SPIE
ISBN:
9781510663664
Page Range / eLocation ID:
25
Format(s):
Medium: X
Location:
San Francisco, United States
Sponsoring Org:
National Science Foundation
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