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The energy and beam current dependence of Ga+focused ion beam milling damage on the sidewall of vertical rectifiers fabricated on n-type Ga2O3was investigated with 5–30 kV ions and beam currents from 1.3–20 nA. The sidewall damage was introduced by etching a mesa along one edge of existing Ga2O3rectifiers. We employed on-state resistance, forward and reverse leakage current, Schottky barrier height, and diode ideality factor from the vertical rectifiers as potential measures of the extent of the ion-induced sidewall damage. Rectifiers of different diameters were exposed to the ion beams and the “zero-area” parameters extracted by extrapolating to zero area and normalizing for milling depth. Forward currents degraded with exposure to any of our beam conductions, while reverse current was unaffected. On-state resistance was found to be most sensitive of the device parameters to Ga+beam energy and current. Beam current was the most important parameter in creating sidewall damage. Use of subsequent lower beam energies and currents after an initial 30 kV mill sequence was able to reduce residual damage effects but not to the point of initial lower beam current exposures.
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A compact dication source for Ba 2+ tagging and heavy metal ion sensor development
Abstract We present a tunable metal ion beam that delivers controllable ion currents in the picoamp range for testing of dry-phase ion sensors. Ion beams are formed by sequential atomic evaporation and single or multiple electron impact ionization, followed by acceleration into a sensing region. Controllability of the ionic charge state is achieved through tuning of electrode potentials that influence the retention time in the ionization region. Barium, lead, and cadmium samples have been used to test the system, with ion currents identified and quantified using a quadrupole mass analyzer. Realization of a clean Ba2+ ion beam within a bench-top system represents an important technical advance toward the development and characterization of barium tagging systems for neutrinoless double beta decay searches in xenon gas. This system also provides a testbed for investigation of novel ion sensing methodologies for environmental assay applications, with dication beams of Pb2+and Cd2+also demonstrated for this purpose.
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- Award ID(s):
- 2004111
- PAR ID:
- 10518736
- Author(s) / Creator(s):
- ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; more »
- Publisher / Repository:
- IOP Publishing
- Date Published:
- Journal Name:
- Journal of Instrumentation
- Volume:
- 18
- Issue:
- 07
- ISSN:
- 1748-0221
- Page Range / eLocation ID:
- P07044
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1088/1748-0221/18/07/P07044
