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  • Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Title: Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Award ID(s):
1826251
PAR ID:
10521945
Author(s) / Creator(s):
; ; ; ; ; ; ;
Publisher / Repository:
Elsevier
Date Published:
Journal Name:
Wear
Volume:
523
Issue:
C
ISSN:
0043-1648
Page Range / eLocation ID:
204731
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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