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Title: Combining In-Line Atomic Force Microscopy and Scatterometry for Metrology of 3D Holographic Patterns In Roll-to-Roll Nanoscale Manufacturing
Award ID(s):
2229036
PAR ID:
10527854
Author(s) / Creator(s):
; ; ; ; ; ; ; ;
Publisher / Repository:
Frontiers of Characterization and Metrology for Nanoelectronics
Date Published:
Format(s):
Medium: X
Location:
Monterey, CA
Sponsoring Org:
National Science Foundation
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