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A recently reported vision ray metrology technique [Opt. Express29,43480(2021)OPEXFF1094-408710.1364/OE.443550] measures geometric wavefronts with high precision. This paper introduces a method to convert these wavefront data into height information, focusing on the impact of back surface flatness and telecentricity errors on measurement accuracy. Systematic errors from these factors significantly affect height measurements. Using ray trace simulations, we estimate reconstruction errors with various plano-concave and plano-convex elements. We also developed a calibration technique to mitigate telecentricity errors, achieving submicron accuracy in surface reconstruction. This study provides practical insights into vision ray metrology systems, highlighting validity limits, emphasizing the importance of calibration for larger samples, and establishing system alignment tolerances. The reported technique for the conversion of geometric wavefronts to surface topography employs a direct non-iterative ray-tracing-free method. It is ideally suited for reference-free metrology with application to freeform optics manufacturing.
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Vision ray metrology for freeform optics
Vision ray techniques are known in the optical community to provide low-uncertainty image formation models. In this work, we extend this approach and propose a vision ray metrology system that estimates the geometric wavefront of a measurement sample using the sample-induced deflection in the vision rays. We show the feasibility of this approach using simulations and measurements of spherical and freeform optics. In contrast to the competitive technique deflectometry, this approach relies on differential measurements and, hence, requires no elaborated calibration procedure that uses sophisticated optimization algorithms to estimate geometric constraints. Applications of this work are the metrology and alignment of freeform optics.
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- PAR ID:
- 10531127
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 29
- Issue:
- 26
- ISSN:
- 1094-4087; OPEXFF
- Format(s):
- Medium: X Size: Article No. 43480
- Size(s):
- Article No. 43480
- Sponsoring Org:
- National Science Foundation
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