This research reports the development of 3D carbon nanostructures that can provide unique capabilities for manufacturing carbon nanotube (CNT) electronic components, electrochemical probes, biosensors, and tissue scaffolds. The shaped CNT arrays were grown on patterned catalytic substrate by chemical vapor deposition (CVD) method. The new fabrication process for catalyst patterning based on combination of nanoimprint lithography (NIL), magnetron sputtering, and reactive etching techniques was studied. The optimal process parameters for each technique were evaluated. The catalyst was made by deposition of Fe and Co nanoparticles over an alumina support layer on a Si/SiO2 substrate. The metal particles were deposited using direct current (DC) magnetron sputtering technique, with a particle ranging from 6 nm to 12 nm and density from 70 to 1000 particles/micron. The Alumina layer was deposited by radio frequency (RF) and reactive pulsed DC sputtering, and the effect of sputtering parameters on surface roughness was studied. The pattern was developed by thermal NIL using Si master-molds with PMMA and NRX1025 polymers as thermal resists. Catalyst patterns of lines, dots, and holes ranging from 70 nm to 500 nm were produced and characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Vertically aligned CNTs were successfully grown on patterned catalyst and their quality was evaluated by SEM and micro-Raman. The results confirm that the new fabrication process has the ability to control the size and shape of CNT arrays with superior quality.
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Enhanced solid solubility in hcp Co(Mo) nanoparticles formed via inert gas condensation
Abstract Co–Mo alloy clusters with extended solubility of Mo in hcp Co were produced by inert gas condensation (IGC). While the equilibrium solubility of Mo in hexagonal close-packed (hcp) Co is on the order of 1 atomic percent, the non-equilibrium aspects of IGC resulted in ~ 18 atomic percent Mo dissolved in hcp Co. The extended solid solutions and hcp structure were observed across all of the processing conditions, which included variation of sputtering power and aperture size. There was, however, variation of nanoparticle size and magnetic behavior with processing parameters. The Co(Mo) nanoparticles were ferromagnetic at room temperature. Coercivities of the nanoparticles produced with a 2.5-mm aperture were independent of sputtering power and significantly higher than those of the nanoparticles produced with a 7-mm aperture. The coercivities of the nanoparticles produced with a 7-mm aperture were slightly power-dependent. Overall, there appeared to be a relationship between coercivity and nanoparticle size.
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- Award ID(s):
- 2211872
- PAR ID:
- 10544224
- Publisher / Repository:
- Springer
- Date Published:
- Journal Name:
- Journal of Nanoparticle Research
- Volume:
- 26
- Issue:
- 8
- ISSN:
- 1388-0764
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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