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Servo error pre-compensation (SEP) is commonly used to improve the accuracy of feed drives. Existing SEP approaches often involve the use of physics-based linear models (e.g., transfer functions) to predict servo errors, but suffer from inaccuracies due to unmodeled nonlinear dynamics in feed drives. This paper proposes a linear hybrid model for SEP that combines physics-based and data-driven linear models. The proposed model is shown to approximate nonlinearities unmodeled in physics-based linear models. In experiments on a precision feed drive, the proposed hybrid model improves the accuracy of servo error prediction by up to 38% compared to a physics-based model.
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