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Abstract Optical polymer‐based integrated photonic devices are gaining interest for applications in optical packaging, biosensing, and augmented/virtual reality (AR/VR). The low refractive index of conventional organic polymers has been a barrier to realizing dense, low footprint photonic devices. The fabrication and characterization of integrated photonic devices using a new class of high refractive index polymers, chalcogenide hybrid inorganic/organic polymers (CHIPs), which possess high refractive indices and lower optical losses compared to traditional hydrocarbon‐based polymers, are reported. These optical polymers are derived from elemental sulfur via the inverse vulcanization process, which allows for inexpensive monomers to be used for these materials. A facile fabrication strategy using CHIPs via lithography is described for single‐mode optical waveguides, Y junction splitters, multimode interferometers (MMIs), and high Q factor ring resonators, along with device characterization. Furthermore, propagation losses of 0.4 dB cm−1near 1550 nm wavelength, which is the lowest measured loss in non‐fluorinated optical polymer waveguides, coupled with the benefits of low cost materials and manufacturing are reported. Ring resonators with Q factor on the order of 6 × 104and cavity finesse of 45, which are some of the highest values reported for optical polymer‐based ring resonators, are also reported.
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This content will become publicly available on November 26, 2025
Design and fabrication of robust hybrid photonic crystal cavities
Abstract Heterogeneously integrated hybrid photonic crystal cavities enable strong light–matter interactions with solid state, optically addressable quantum memories. A key challenge to realizing high quality factor (Q) hybrid photonic crystals is the reduced index contrast on the substrate compared to suspended devices in air. This challenge is particularly acute for color centers in diamond because of diamond’s high refractive index, which leads to increased scattering loss into the substrate. Here, we develop a design methodology for hybrid photonic crystals utilizing a detailed understanding of substrate-mediated loss, which incorporates sensitivity to fabrication errors as a critical parameter. Using this methodology, we design robust, high-Q, GaAs-on-diamond photonic crystal cavities, and by optimizing our fabrication procedure, we experimentally realize cavities withQapproaching 30,000 at a resonance wavelength of 955 nm.
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- Award ID(s):
- 2011750
- PAR ID:
- 10585750
- Publisher / Repository:
- Nanophotonics
- Date Published:
- Journal Name:
- Nanophotonics
- ISSN:
- 2192-8606
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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