High‐quality‐factor microring resonators are highly desirable in many applications. Fabricating a microring resonator typically requires delicate instruments to ensure a smooth side wall of waveguides and 100‐nm critical feature size in the coupling region. In this work, a new method “damascene soft nanoimprinting lithography” is demonstrated that can create high‐fidelity waveguide by simply backfilling an imprinted cladding template with a high refractive index polymer core. This method can easily realize high Q‐factor polymer microring resonators (e.g., ≈5 × 105around 770 nm wavelength) without the use of any expensive instruments and can be conducted in a normal lab environment. The high Q‐factors can be attributed to the residual layer‐free feature and controllable meniscus cross‐section profile of the filled polymer core. Furthermore, the new method is compatible with different polymers, yields low fabrication defects, enables new functionalities, and allows flexible substrate. These benefits can broaden the applicability of the fabricated microring resonator.
Optical polymer‐based integrated photonic devices are gaining interest for applications in optical packaging, biosensing, and augmented/virtual reality (AR/VR). The low refractive index of conventional organic polymers has been a barrier to realizing dense, low footprint photonic devices. The fabrication and characterization of integrated photonic devices using a new class of high refractive index polymers, chalcogenide hybrid inorganic/organic polymers (CHIPs), which possess high refractive indices and lower optical losses compared to traditional hydrocarbon‐based polymers, are reported. These optical polymers are derived from elemental sulfur via the inverse vulcanization process, which allows for inexpensive monomers to be used for these materials. A facile fabrication strategy using CHIPs via lithography is described for single‐mode optical waveguides, Y junction splitters, multimode interferometers (MMIs), and high Q factor ring resonators, along with device characterization. Furthermore, propagation losses of 0.4 dB cm−1near 1550 nm wavelength, which is the lowest measured loss in non‐fluorinated optical polymer waveguides, coupled with the benefits of low cost materials and manufacturing are reported. Ring resonators with Q factor on the order of 6 × 104and cavity finesse of 45, which are some of the highest values reported for optical polymer‐based ring resonators, are also reported.
more » « less- Award ID(s):
- 2118578
- NSF-PAR ID:
- 10444443
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Optical Materials
- Volume:
- 10
- Issue:
- 16
- ISSN:
- 2195-1071
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Chalcogenide hybrid inorganic/organic polymers (CHIPs) are a new class of optical polymeric materials for imaging and photonic applications due to their high refractive indices and high optical transmission at visible and infrared wavelengths. In this study, we characterize these polymers to study the refractive index and delve into the electronic properties by way of measurements of their dielectric constants. Ellipsometry is used to determine the refractive indices for wavelengths from 500 nm to 12 µm, while we use capacitance measurements on thin film capacitors with a range of areas to find the dielectric constant. The results are in line with expectations based on the sulfur composition of the polymers-indices range from 1.7 to 1.85, and dielectric constants range from 2.6 to 3. With these measurements, these sulfur polymer materials are established to be good candidates for optical and photonic applications, particularly with respect to telecommunications. The dielectric constants suggest that applications such as electro-optic devices and capacitors may also be viable.
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