TCf Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation
- Award ID(s):
- 1944304
- PAR ID:
- 10585946
- Publisher / Repository:
- IEEE
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 33
- Issue:
- 5
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 620 to 630
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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