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This content will become publicly available on June 29, 2026

Title: Ku-Band Alscn-on-Diamond SAW Resonators with Phase Velocity Above 8600 M/S
In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity (𝑣𝑣p) of 8671 m/s, a maximum Bode-Q of 408, and coupling coefficient (𝑘𝑘eff 2 )of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8 to 18 GHz are presented. The platform’s high power handling above 12.5 dBm is also experimentally validated.  more » « less
Award ID(s):
2339731
PAR ID:
10632396
Author(s) / Creator(s):
; ; ; ; ; ;
Publisher / Repository:
IEEE
Date Published:
ISBN:
979-8-3315-1381-8
Page Range / eLocation ID:
172 to 175
Format(s):
Medium: X
Location:
Orlando, FL, USA
Sponsoring Org:
National Science Foundation
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