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Title: Electron-Beam Lithography Exposure Effect on Nanoantennas and Metasurfaces
Calculate nanoantenna dimensions for different exposure dose, substrates, and array density  more » « less
Award ID(s):
2418519
PAR ID:
10652542
Author(s) / Creator(s):
;
Publisher / Repository:
nanoHUB
Date Published:
Edition / Version:
1.0
Format(s):
Medium: X
Right(s):
.
Sponsoring Org:
National Science Foundation
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