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Single-Crystal Silicon Thermal-Piezoresistive Resonators as High-Stability Frequency References
- Award ID(s):
- 2221881
- PAR ID:
- 10655975
- Publisher / Repository:
- IEEE
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 34
- Issue:
- 1
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 15 to 23
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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