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Title: Approaching ~0.1ppb Frequency Stability in ~11MHz AlN-on-Si Dual-Ring Bulk Acoustic Wave Mems Resonator
Award ID(s):
2221881 2103091
PAR ID:
10655976
Author(s) / Creator(s):
 ;  ;  ;  
Publisher / Repository:
IEEE
Date Published:
Page Range / eLocation ID:
201 to 204
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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