skip to main content
US FlagAn official website of the United States government
dot gov icon
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
https lock icon
Secure .gov websites use HTTPS
A lock ( lock ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

Attention:

The NSF Public Access Repository (PAR) system and access will be unavailable from 10:00 PM ET on Friday, February 6 until 10:00 AM ET on Saturday, February 7 due to maintenance. We apologize for the inconvenience.

Explore Research Products in the PAR
It may take a few hours for recently added research products to appear in PAR search results.


  • NSF Public Access
  • Search Results
  • Record-High Pr (2Pr>40uC/cm2) in 3 nm (Physical) Ferroelectric HZO Annealed at 450C: High-T (85 °C) Electrical Cycling and Oxygen Vacancy Engineering
Title: Record-High Pr (2Pr>40uC/cm2) in 3 nm (Physical) Ferroelectric HZO Annealed at 450C: High-T (85 °C) Electrical Cycling and Oxygen Vacancy Engineering
Award ID(s):
2346953
PAR ID:
10663201
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
IEEE
Date Published:
Page Range / eLocation ID:
1 to 3
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
  1. ; ; ; ; ; ; ; (, Journal of Alloys and Compounds)
  2. ; ; (, ACS Applied Polymer Materials)
  3. ; ; ; ; ; ; (, 2023 IEEE Symposium on Electromagnetic Compatibility & Signal/Power Integrity (EMC+SIPI))
  4. ; ; ; ; ; ; ; ; ; ; et al (, IEEE)
  5. ; ; (, IEEE)
  • Citation Formats
  • MLA
  • APA
  • Chicago
  • BibTeX
  • Text Encoded Conversion
  • XML
  • Save / Share this Record
  • Send to Email