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Analysis and applications of a heralded electron source

https://doi.org/10.1088/1367-2630/ada8d0

Koppell, Stewart ; Simonaitis, John ; Krielaart, Maurice ; Berggren, Karl_K ; Keathley, Phillip_D ; Putnam, William ( January 2025 , New Journal of Physics)

Abstract
We analytically describe the noise properties of a heralded electron source made from a standard electron gun, a weak photonic coupler, a single photon counter, and an electron energy filter. We describe the sub-Poissonian statistics of the source, the engineering requirements for efficient heralding, and several potential applications. We use simple models of electron beam processes to demonstrate advantages which are situational, but potentially significant in electron lithography and scanning electron microscopy.

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Apparatus for studying low energy electron-photon interactions inside a Scanning Electron Microscope

Simonaitis, John ; Krielaart, Maurice ; Alongi, Joseph ; Berggren, Karl ; Keathley, Phillip D. ( June 2023 , 2023 International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication)

Full Text Available
A Low-Energy Counting Electron Spectrometer Integrated into a Scanning Electron Microscope

Simonaitis, John ; Krielaart, Maurice ; Slayton, Benjamin ; Alongi, Joseph ; Yang-Keathley, Yugu ; Berggren, Karl ; Keathley, Phillip D. ( June 2023 , 2023 International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN))

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Applications in Microscopy and Lithography for a Heralded Electron Source

https://doi.org/10.1109/IVNC57695.2023.10188972

Koppell, Stewart A. ; Simonaitis, John W. ; Krielaart, Maurice A.R. ; Ates, Omer E. ; Putnam, William P. ; Berggren, Karl K. ; Keathley, Phillip. D. ( July 2023 , 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC))

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Electron-Photon Interactions in a Scanning Electron Microscope

https://doi.org/10.1109/IVNC57695.2023.10188999

Simonaitis, John W. ; Krielaart, Maurice A. ; Koppell, Stewart A. ; Slayton, Benjamin J. ; Alongi, Joseph ; Putnam, William P. ; Berggren, Karl K. ; Keathley, Phillip D. ( July 2023 , 2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC))

Full Text Available