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Khachariya, Dolar; Stein, Shane; Mecouch, Will; Breckenridge, M. Hayden; Rathkanthiwar, Shashwat; Mita, Seiji; Moody, Baxter; Reddy, Pramod; Tweedie, James; Kirste, Ronny; et al (, Applied Physics Express)Abstract We report a kV class, low ON-resistance, vertical GaN junction barrier Schottky (JBS) diode with selective-area p-regions formed via Mg implantation followed by high-temperature, ultra-high pressure (UHP) post-implantation activation anneal. The JBS has an ideality factor of 1.03, a turn-on voltage of 0.75 V, and a specific differential ON-resistance of 0.6 mΩ·cm 2 . The breakdown voltage of the JBS diode is 915 V, corresponding to a maximum electric field of 3.3 MV cm −1 . These results underline that high-performance GaN JBS can be realized using Mg implantation and high-temperature UHP post-activation anneal.more » « less
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Guo, Qiang; Kirste, Ronny; Reddy, Pramod; Mecouch, Will; Guan, Yan; Mita, Seiji; Washiyama, Shun; Tweedie, James; Sitar, Zlatko; Collazo, Ramón (, Japanese Journal of Applied Physics)null (Ed.)
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Reddy, Pramod; Hayden Breckenridge, M.; Guo, Qiang; Klump, Andrew; Khachariya, Dolar; Pavlidis, Spyridon; Mecouch, Will; Mita, Seiji; Moody, Baxter; Tweedie, James; et al (, Applied Physics Letters)
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Reddy, Pramod; Washiyama, Shun; Mecouch, Will; Hernandez-Balderrama, Luis H.; Kaess, Felix; Hayden Breckenridge, M.; Sarkar, Biplab; Haidet, Brian B.; Franke, Alexander; Kohn, Erhard; et al (, Journal of Vacuum Science & Technology A)
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Wang, Ke; Kirste, Ronny; Mita, Seiji; Washiyama, Shun; Mecouch, Will; Reddy, Pramod; Collazo, Ramón; Sitar, Zlatko (, Applied Physics Letters)
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