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AlGaN-delta-GaN quantum well (QW) structures have been demonstrated to be good candidates for the realization of high-efficiency deep-ultraviolet (DUV) light-emitting diodes (LEDs). However, such heterostructures are still not fully understood. This study focuses on investigation of the optical properties and efficiency of the AlGaN-delta-GaN QW structures using self-consistent six-band k⸱p modelling and finite difference time domain (FDTD) simulations. Structures with different Al contents in the AlxGa1−xN sub-QW and AlyGa1−yN barrier regions are examined in detail. Results show that the emission wavelength (λ) can be engineered through manipulation of delta-GaN layer thickness, sub-QW Al content (x), and barrier Al content (y), while maintaining a large spontaneous emission rate corresponding to around 90% radiative recombination efficiency (ηRAD). In addition, due to the dominant transverse-electric (TE)-polarized emission from the AlGaN-delta-GaN QW structure, the light extraction efficiency (ηEXT) is greatly enhanced when compared to a conventional AlGaN QW. Combined with the large ηRAD, this leads to the significant enhancement of external quantum efficiency (ηEQE), indicating that AlGaN-delta-GaN structures could be a promising solution for high-efficiency DUV LEDs. 

We report on the realization of top-down fabricated, electrically driven, deep-ultraviolet (DUV) AlGaN micropillar array light emitting diodes (LEDs) with high output power density. Ordered arrays of micropillars with the inverse-taper profile were formed from an AlGaN epitaxial stack (epistack) using a Ni-masked Cl2 plasma dry etch and KOH-based wet etching. Following deposition of the n-contact, polydimethylsiloxane was spin-coated and etched-back to reveal the tips of the pillars to allow for formation of the p-contact. The DUV LEDs were tested at the wafer-level using a manual probe station to characterize their electrical and optical properties, revealing stable electroluminescence at 286 nm with a narrow 9-nm linewidth. Optical output power was found to be linearly related to current density, with output power densities up to 35 mW/cm2, comparable to the results reported for epitaxially grown DUV nanowire LEDs. Simulations revealed that the inverse-taper profile of the micropillars could lead to large enhancements in light extraction efficiency (ηEXT) of up to 250% when compared to micropillars with vertical sidewalls. The realization of ordered, electrically driven, top-down fabricated micropillar DUV LEDs with competitive output power represents an important step forward in the development of high-efficiency, scalable DUV emitters for a wide range of applications.