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We demonstrate a dual-cavity modulator based mm-wave to optical converter on GF45SPCLO platform. An optical energy conversion efficiency at -29.8 dB and a side-band SNR at 30.7 dB are reported. 

We demonstrate a Dual Active-Cavity RF modulator combining T-shaped spoked junction with a novel “half-rib” waveguide in a monolithic electronic-photonic platform. We measure a sideband efficiency of -52 dB at 66 GHz RF carrier frequency. 

We demonstrate a Dual Active-Cavity RF modulator combining T-shaped spoked junction with a novel “half-rib” waveguide in a monolithic electronic-photonic platform. We measure a sideband efficiency of -52 dB at 66 GHz RF carrier frequency. 

We demonstrate a path to scalable, wavelength- multiplexed RF/mm-wave-photonic front-end systems-on-chip for radar and extreme massive MIMO arrays, in 300mm-foundry 45nm RF SOI CMOS. We demonstrate mm-wave-to-optical sensing elements comprising low-noise amplifiers (LNAs) mono- lithically integrated with triply-resonant photonic microring- resonator based modulators. The “photonic molecule” modulator concept breaks the conventional ring modulator conversion efficiency-bandwidth tradeoff and provides optimal performance RF-photonic applications, while supporting high bandwidth den- sities. We show a first experiment with projected noise figure of 24dB at 57GHz (30mW/element, -45dBm RF-input, 6dBm laser LO). The elements are tileable at small pitches, enabling photonic disaggregation of large-scale phased arrays. 

Convergence of high-performance silicon photonics and electronics, monolithically integrated in state-of-the-art CMOS platforms, is the holy grail for enabling the ultimate efficiencies, performance, and scaling of electronic-photonic systems-on-chip. It requires the emergence of platforms that combine state-of-the-art RF transistors with optimized silicon photonics, and a generation of photonic device technology with ultralow energies, increased operating spectrum, and the elimination of power-hungry thermal tuning. In this paper, in a co-optimized monolithic electronics-photonics platform (GlobalFoundries 45CLO), we turn the metal-oxide-semiconductor (MOS) field-effect transistor’s basic structure into a novel, highly efficient MOS capacitor ring modulator. It has the smallest ring cavity (1.5 μm radius), largest corresponding spur-free free spectral range ( FSR = 8.5    THz ), and record 30 GHz/V shift efficiency in the O-band among silicon modulators demonstrated to date. With 1 V pp RF drive, we show an open optical eye while electro-optically tuning the modulator to track over 400 pm (69 GHz) change in the laser wavelength (using 2.5 V DC range). A 90 GHz maximum electro-optic resonance shift is demonstrated with under 40 nW of power, providing a strong nonthermal tuning mechanism in a CMOS photonics platform. The modulator has a separately optimized body layer but shares the gate device layer and the gate oxide with 45 nm transistors, while meeting all CMOS manufacturability design rules. This type of convergent evolution of electronics and photonics may be the future of platforms for high-performance systems-on-chip.