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The vibration-assisted atomic force microscope (AFM)-based nanomachining offers a promising opportunity for low-cost nanofabrication with high tunability. However, critical challenges reside in advancing the throughput and the quality assurance of the process due to extensive offline experimental investigations and characterizations, which in turn hinders the wide industry applications of current AFM-based nanomachining process. Hence, it is necessary to create an in-process monitoring for the nanomachining to allow real-time inspection and process characterizations. This paper reports a sensor-based analytic approach to allow real-time estimations of the AFM-based nanomachining process. The temporal-spectral features of collected acoustic emission (AE) sensor signals are applied to predict the depth morphology of nanomachined trenches under different machining conditions. The experimental case study suggests that the most significant frequency domain information from AE sensor can accurately predict (R-squared value around 92%) the nanomachined depth profile. It, therefore, breaks the current limitation of characterization tools at the nanoscale precision level, and opens up an opportunity to allow real-time estimation for quality inspection of vibration-assisted AFM-based nanofabrication process. 

The oxidation mechanism of atomically thin molybdenum disulfide (MoS₂) plays a critical role in its nanoelectronics, optoelectronics, and catalytic applications, where devices often operate in an elevated thermal environment. In this study, we systematically investigate the oxidation of mono- and few-layer MoS₂flakes in the air at temperatures ranging from 23 °C to 525 °C and relative humidities of 10%–60% by using atomic force microscopy (AFM), Raman spectroscopy and x-ray photoelectron spectroscopy. Our study reveals the formation of a uniform nanometer-thick physical adsorption layer on the surface of MoS₂, which is attributed to the adsorption of ambient moisture. This physical adsorption layer acts as a thermal shield of the underlying MoS₂lattice to enhance its thermal stability and can be effectively removed by an AFM tip scanning in contact mode or annealing at 400 °C. Our study shows that high-temperature thermal annealing and AFM tip-based cleaning result in chemical adsorption on sulfur vacancies in MoS₂, leading to p-type doping. Our study highlights the importance of humidity control in ensuring reliable and optimal performance for MoS₂-based electronic and electrochemical devices and provides crucial insights into the surface engineering of MoS₂, which are relevant to the study of other two-dimensional transition metal dichalcogenide materials and their applications.

 

The atomic force microscope (AFM)-based nanomachining has the potential for highly customized nanofabrication due to its low cost and tunability. However, the low productivity and issues related to the quality assurance for AFM-based nanomachining impede it from large-scale production due to the extensive experimental study for turning process parameters with time-consuming offline characterizations. This work reports an analytic approach to capturing the AE spectral frequency responses from the nanopatterning process using vibration-assisted AFM-based nanomachining. The experimental case study suggests the presented approach allows characterizations of subtle variations on the AE frequency responses during the nanomachining processes (with overall 93% accuracy), which opens up the chance to explain the variations of the nano-dynamics using the senor-based monitoring approach for vibration-assisted AFM-based nanomachining. 

Continuum mechanics break down in bending stiffness calculations of mono- and few-layered two-dimensional (2D) van der Waals crystal sheets, because their layered atomistic structures are uniquely characterized by strong in-plane bonding coupled with weak interlayer interactions. Here, we elucidate how the bending rigidities of pristine mono- and few-layered molybdenum disulfide (MoS 2 ), graphene, and hexagonal boron nitride (hBN) are governed by their structural geometry and intra- and inter-layer bonding interactions. Atomic force microscopy experiments on the self-folded conformations of these 2D materials on flat substrates show that the bending rigidity of MoS 2 significantly exceeds those of graphene or hBN of comparable layers, despite its much lower tensile modulus. Even on a per-thickness basis, MoS 2 is found to possess similar bending stiffness to hBN and is much stiffer than graphene. Density functional theory calculations suggest that this high bending rigidity of MoS 2 is due to its large interlayer thickness and strong interlayer shear, which prevail over its weak in-plane bonding.