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An unconventional “heteromorphic” superlattice (HSL) is realized, comprised of repeated layers of different materials with differing morphologies: semiconducting pc-In2O3 layers interleaved with insulating a-MoO3 layers. Originally proposed by Tsu in 1989, yet never fully realized, the high quality of the HSL heterostructure demonstrated here validates the intuition of Tsu, whereby the flexibility of the bond angle in the amorphous phase and the passivation effect of the oxide at interfacial bonds serve to create smooth, high-mobility interfaces. The alternating amorphous layers prevent strain accumulation in the polycrystalline layers while suppressing defect propagation across the HSL. For the HSL with 7:7 nm layer thickness, the observed electron mobility of 71 cm2/Vs, matches that of the highest quality In2O3 thin films. The atomic structure and electronic properties of crystalline In2O3 / amorphous MoO3 interfaces are verified using ab-initio molecular dynamics simulations and hybrid functional calculations. This work generalizes the superlattice concept to an entirely new paradigm of morphological combinations. 

Abstract A scaling law is demonstrated in the conductivity of gated two-dimensional (2D) materials with tunable concentrations of ionized impurity scatterers. Experimental data is shown to collapse onto a single 2D conductivity scaling (2DCS) curve when the mobility is scaled by r , the relative impurity-induced scattering, and the gate voltage is shifted by V s , a consequence of impurity-induced doping. This 2DCS analysis is demonstrated first in an encapsulated 2D black phosphorus multilayer at T = 100 K with charge trap densities programmed by a gate bias upon cooldown, and next in a Bi 2 Se 3 2D monolayer at room temperature exposed to varying concentrations of gas adsorbates. The observed scaling can be explained using a conductivity model with screened ionized impurity scatterers. The slope of the r  vs.  V s plot defines a disorder-charge specific scattering rate Γ q = d r / d V s equivalent to a scattering strength per unit impurity charge density: Γ q > 0 indicates a preponderance of positively charged impurities with Γ q < 0 for negatively charged. This 2DCS analysis is expected to be applicable in arbitrary 2D materials systems with tunable impurity density, which will advance 2D materials characterization and improve performance of 2D sensors and transistors.