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Abstract As an alternative to traditional photolithography, printing processes are widely explored for the patterning of customizable devices. However, to date, the majority of high‐resolution printing processes for functional nanomaterials are additive in nature. To complement additive printing, there is a need for subtractive processes, where the printed ink results in material removal, rather than addition. In this study, a new subtractive patterning approach that uses electrohydrodynamic‐jet (e‐jet) printing of acid‐based inks to etch nanoscale zinc oxide (ZnO) thin films deposited using atomic layer deposition (ALD) is introduced. By tuning the printing parameters, the depth and linewidth of the subtracted features can be tuned, with a minimum linewidth of 11 µm and a tunable channel depth with ≈5 nm resolution. Furthermore, by tuning the ink composition, the volatility and viscosity of the ink can be adjusted, resulting in variable spreading and dissolution dynamics at the solution/film interface. In the future, acid‐based subtractive patterning using e‐jet printing can be used for rapid prototyping or customizable manufacturing of functional devices on a range of substrates with nanoscale precision.more » « less
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Abstract A customized atmospheric‐pressure spatial atomic layer deposition (AP‐SALD) system is designed and implemented, which enables mechatronic control of key process parameters, including gap size and parallel alignment. A showerhead depositor delivers precursors to the substrate while linear actuators and capacitance probe sensors actively maintain gap size and parallel alignment through multiple‐axis tilt and closed‐loop feedback control. Digital control of geometric process variables with active monitoring is facilitated with a custom software control package and user interface. AP‐SALD of TiO2is performed to validate self‐limiting deposition with the system. A novel multi‐axis printing methodology is introduced usingx‐yposition control to define a customized motion path, which enables an improvement in the thickness uniformity by reducing variations from 8% to 2%. In the future, this mechatronic system will enable experimental tuning of parameters that can inform multi‐physics modeling to gain a deeper understanding of AP‐SALD process tolerances, enabling new pathways for non‐traditional SALD processing that can push the technology towards large‐scale manufacturing.more » « less
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Abstract Although spectrally selective materials play a key role in existing and emerging solar thermal technologies, temperature‐related degradation currently limits their use to below 700 °C in vacuum and even lower temperatures in air. Here a solar‐transparent refractory aerogel that offers stable performance up to 800 °C in air is demonstrated, which is significantly greater than its silica counterpart. This improved stability is attributed to the formation of a refractory aluminum silicate phase, which is synthesized using a conformal single cycle of atomic layer deposition within the high‐aspect‐ratio pores of silica aerogels. Based on direct heat loss measurements, the transparent refractory aerogel achieves a receiver efficiency of 75% at 100 suns and an absorber temperature of 700 °C, which is a 5% improvement over the state of the art. Transparent refractory aerogels may find widespread applicability in solar thermal technologies by enabling the use of lower‐cost optical focusing systems and eliminating the need for highly evacuated receivers. In particular, a shift to higher operating temperatures while maintaining a high receiver efficiency can enable the use of advanced supercritical CO2power cycles and ultimately translate to an ≈10% (absolute) improvement in solar‐to‐electrical conversion efficiency relative to existing linear concentrating systems.more » « less
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Abstract Marine biofouling is a sticky global problem that hinders maritime industries. Various microscale surface structures inspired by marine biological species have been explored for their anti‐fouling properties. However, systematic studies of anti‐marine‐fouling performance on surface architectures with characteristic length‐scales spanning from below 100 nm to greater than 10 µm are generally lacking. Herein, a study on the rational design and fabrication of ZnO/Al2O3core–shell nanowire architectures with tunable geometries (length, spacing, and branching) and surface chemistry is presented. The ability of the nanowires to significantly delay or prevent marine biofouling is demonstrated. Compared to planar surfaces, hydrophilic nanowires can reduce fouling coverage by up to ≈60% after 20 days. The fouling reduction mechanism is mainly due to two geometric effects: reduced effective settlement area and mechanical cell penetration. Additionally, superhydrophobic nanowires can completely prevent marine biofouling for up to 22 days. The nanowire surfaces are transparent across the visible spectrum, making them applicable to windows and oceanographic sensors. Through the rational control of surface nano‐architectures, the coupled relationships between wettability, transparency, and anti‐biofouling performance are identified. It is envisioned that the insights gained from the work can be used to systematically design surfaces that reduce marine biofouling in various industrial settings.more » « less
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Free, publicly-accessible full text available September 10, 2025
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Spatial atomic layer deposition (SALD) is a thin film deposition technique that could provide precise atomic-scale control at a large enough scale for many applications, such as clean energy technologies, catalytic conversion, batteries, and anti-fouling coatings. The spatially separated precursor zones are sequentially exposed to the substrate surface to deposit a film with precise control. If the precursor zones were to intermix during a deposition process, the precise control over film thickness would be lost. Therefore, it is essential to control the location of the precursors within the process region during a manufacturing process. This is typically achieved by controlling the gas flow rates and/or pressures, however it is challenging to actively monitor the location of the precursors during a deposition process as the process region has a small characteristic length and the vapor/gas precursors are difficult to observe/monitor. Therefore, there is a need to validate the precursor location and consequential process quality during a deposition. This can be of particular importance for substrate surfaces that are highly irregular or for manufacturing conditions where external factors such as temperature and ambient air speeds could change dynamically. In this study, a reduced order COMSOL Multiphysics® model is introduced that can predict the location of precursors in the process region. The model itself is discussed; the mesh size is selected considering accuracy and computation time; the model outputs are shown; and an initial experimental validation of the model is demonstrated.more » « lessFree, publicly-accessible full text available June 17, 2025
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Marine biofouling is a complex and dynamic process that significantly increases the carbon emissions from the maritime industry by increasing drag losses. However, there are no existing non‐toxic marine paints that can achieve both effective fouling reduction and efficient fouling release. Inspired by antifouling strategies in nature, herein, a superoleophobic zwitterionic nanowire coating with a nanostructured hydration layer is introduced, which exhibits simultaneous fouling reduction and release performance. The zwitterionic nanowires demonstrate >25% improvement in fouling reduction compared to state‐of‐the‐art antifouling nanostructures, and four times higher fouling‐release compared to conventional zwitterionic coatings. Fouling release is successfully achieved under a wall shear force that is four orders of magnitude lower than regular water jet cleaning. The mechanism of this simultaneous fouling reduction and release behavior is explored, and it is found that a combination of 1) a mechanical biocidal effect from the nanowire geometry, and 2) low interfacial adhesion resulting from the nanostructured hydration layer, are the major contributing factors. These findings provide insights into the design of nanostructured coatings with simultaneous fouling reduction and release. The newly established synthesis procedure for the zwitterionic nanowires opens new pathways for implementation as antifouling coatings in the maritime industry and biomedical devices.more » « less