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Biological systems seamlessly combine multiple functions in lightweight and energy-efficient structures. Such capability in synthetic structures would be desirable in numerous engineering applications such as aerospace, robotics and wearable devices. Here we report an integrated silicon-based structure configured to sense, perform different classification algorithms, and produce an action signal within the same physical layer. The algorithms are coded in the mechanical responses of the sensing elements of multiple coupled micro-electro-mechanical systems (MEMS), simultaneously capturing acceleration measurements to produce an actuated signal. This all-in-one structure operates with zero circuitry and low power consumption. As a demonstration, we designed and fabricated a network of three MEMS neurons to successfully perform both simple signal classification and activity recognition problems (standing and sitting) with only 9.92 × 10⁻¹⁷kWh and 17.79 × 10⁻¹⁹kWh energy consumption per operation, respectively. Our approach will enable emergent technologies, such as wearable devices, to perform complex computations with power from a single battery charge.

 

In this work, we show the computational potential of MEMS devices by predicting the dynamics of a 10th order nonlinear auto-regressive moving average (NARMA10) dynamical system. Modeling this system is considered complex due to its high nonlinearity and dependency on its previous values. To model the NARMA10 system, we used a reservoir computing scheme by utilizing one MEMS device as a reservoir, produced by the interaction of 100 virtual nodes. The virtual nodes are attained by sampling the input of the MEMS device and modulating this input using a random modulation mask. The interaction between virtual nodes within the system was produced through delayed feedback and temporal dependence. Using this approach, the MEMS device was capable of adequately capturing the NARMA10 response with a normalized root mean square error (NRMSE) = 6.18% and 6.43% for the training and testing sets, respectively. In practice, the MEMS device would be superior to simulated reservoirs due to its ability to perform this complex computing task in real time.

 

The size and power limitations in small electronic systems such as wearable devices limit their potential. Significant energy is lost utilizing current computational schemes in processes such as analog-to-digital conversion and wireless communication for cloud computing. Edge computing, where information is processed near the data sources, was shown to significantly enhance the performance of computational systems and reduce their power consumption. In this work, we push computation directly into the sensory node by presenting the use of an array of electrostatic Microelectromechanical systems (MEMS) sensors to perform colocalized sensing-and-computing. The MEMS network is operated around the pull-in regime to access the instability jump and the hysteresis available in this regime. Within this regime, the MEMS network is capable of emulating the response of the continuous-time recurrent neural network (CTRNN) computational scheme. The network is shown to be successful at classifying a quasi-static input acceleration waveform into square or triangle signals in the absence of digital processors. Our results show that the MEMS may be a viable solution for edge computing implementation without the need for digital electronics or micro-processors. Moreover, our results can be used as a basis for the development of new types of specialized MEMS sensors (ex: gesture recognition sensors).

 

This paper presents an energy-efficient classification framework that performs human activity recognition (HAR). Typically, HAR classification tasks require a computational platform that includes a processor and memory along with sensors and their interfaces, all of which consume significant power. The presented framework employs microelectromechanical systems (MEMS) based Continuous Time Recurrent Neural Network (CTRNN) to perform HAR tasks very efficiently. In a real physical implementation, we show that the MEMS-CTRNN nodes can perform computing while consuming power on a nano-watts scale compared to the micro-watts state-of-the-art hardware. We also confirm that this huge power reduction doesn't come at the expense of reduced performance by evaluating its accuracy to classify the highly cited human activity recognition dataset (HAPT). Our simulation results show that the HAR framework that consists of a training module, and a network of MEMS-based CTRNN nodes, provides HAR classification accuracy for the HAPT that is comparable to traditional CTRNN and other Recurrent Neural Network (RNN) implantations. For example, we show that the MEMS-based CTRNN model average accuracy for the worst-case scenario of not using pre-processing techniques, such as quantization, to classify 5 different activities is 77.94% compared to 78.48% using the traditional CTRNN. 

The goal of this paper is to provide a novel computing approach that can be used to reduce the power consumption, size, and cost of wearable electronics. To achieve this goal, the use of microelectromechanical systems (MEMS) sensors for simultaneous sensing and computing is introduced. Specifically, by enabling sensing and computing locally at the MEMS sensor node and utilizing the usually unwanted pull in/out hysteresis, we may eliminate the need for cloud computing and reduce the use of analog-to-digital converters, sampling circuits, and digital processors. As a proof of concept, we show that a simulation model of a network of three commercially available MEMS accelerometers can classify a train of square and triangular acceleration signals inherently using pull-in and release hysteresis. Furthermore, we develop and fabricate a network with finger arrays of parallel plate actuators to facilitate coupling between MEMS devices in the network using actuating assemblies and biasing assemblies, thus bypassing the previously reported coupling challenge in MEMS neural networks. 

This work presents an approach to delay-based reservoir computing (RC) at the sensor level without input modulation. It employs a time-multiplexed bias to maintain transience while utilizing either an electrical signal or an environmental signal (such as acceleration) as an unmodulated input signal. The proposed approach enables RC carried out by sufficiently nonlinear sensory elements, as we demonstrate using a single electrostatically actuated microelectromechanical system (MEMS) device. The MEMS sensor can perform colocalized sensing and computing with fewer electronics than traditional RC elements at the RC input (such as analog-to-digital and digital-to-analog converters). The performance of the MEMS RC is evaluated experimentally using a simple classification task, in which the MEMS device differentiates between the profiles of two signal waveforms. The signal waveforms are chosen to be either electrical waveforms or acceleration waveforms. The classification accuracy of the presented MEMS RC scheme is found to be over 99%. Furthermore, the scheme is found to enable flexible virtual node probing rates, allowing for up to 4× slower probing rates, which relaxes the requirements on the system for reservoir signal sampling. Finally, our experiments show a noise-resistance capability for our MEMS RC scheme.