Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF 4
- NSF-PAR ID:
- 10018142
- Publisher / Repository:
- IOP Publishing
- Date Published:
- Journal Name:
- Plasma Sources Science and Technology
- Volume:
- 25
- Issue:
- 4
- ISSN:
- 1361-6595
- Page Range / eLocation ID:
- 045015
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation