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Title: Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF 4
NSF-PAR ID:
10018142
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
IOP Publishing
Date Published:
Journal Name:
Plasma Sources Science and Technology
Volume:
25
Issue:
4
ISSN:
1361-6595
Page Range / eLocation ID:
045015
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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