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Title: Optothermoplasmonic Nanolithography for On‐Demand Patterning of 2D Materials
Abstract

Since the first discovery of graphene, 2D materials are drawing tremendous attention due to their atomic thickness and superior properties. Fabrication of high‐quality micro‐/nanopatterns of 2D materials is essential for their applications in both nanoelectronics and nanophotonics. In this work, an all‐optical lithographic technique, optothermoplasmonic nanolithography (OTNL), is developed to achieve high‐throughput, versatile, and maskless patterning of different atomic layers. Low‐power (≈5 mW µm−2) and high‐resolution patterning of both graphene and MoS2monolayers is demonstrated through exploiting thermal oxidation and sublimation at the highly localized thermoplasmonic hotspots. Density functional theory simulations reveal that Au nanoparticles reduce the formation energy (≈0.6 eV) of C monovacancies through bonding between undercoordinated C and Au, leading to a significant Au‐catalyzed graphene oxidation and a reduction of the required laser operation power. Programmable patterning of 2D materials into complex and large‐scale nanostructures is further demonstrated. With its low‐power, high‐resolution, and versatile patterning capability, OTNL offers the possibility to scale up the fabrication of nanostructured 2D materials for many applications in photonic and electronic devices.

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Award ID(s):
1704634
NSF-PAR ID:
10067906
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
Wiley Blackwell (John Wiley & Sons)
Date Published:
Journal Name:
Advanced Functional Materials
Volume:
28
Issue:
41
ISSN:
1616-301X
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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    This work was partially supported by the U.S. National Science Foundation (NSF) Award No. ECCS-1931088. S.L. and H.W.S. acknowledge the support from the Improvement of Measurement Standards and Technology for Mechanical Metrology (Grant No. 22011044) by KRISS.

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