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Abstract Interface stress between structural materials and thin film coatings has a significant influence on the resonant frequency of microelectromechanical system (MEMS) resonators. In this work, the axial stress on different types of buckled bridge MEMS resonator structures is controlled through the solid‐to‐solid phase transition of a VO2thin film coating. The devices have identical dimensions, but different buckling orientations and profiles due to the combined effect of overetching and residual thermal stress mismatch. Thermal actuation is used to tune the resonant frequency of the device, but the changes in frequency are found to be dependent on the type of buckling for the device. Thermal actuation is achieved by applying an electrical current to integrated heaters, or by uniform substrate heating. Bidirectional tunability is found when substrate heating is used, while Joule heating shows a monotonic change in frequency. This phenomenon can be attributed to the transition in boundary conditions, where the turning points are indicated by the prominent changes in buckling amplitude. In addition, devices with opposite buckling orientations exhibit different tuning behaviors which can be explained by different bending moments induced by beam stress interface modification.
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Snap-Through and Mechanical Strain Analysis of a MEMS Bistable Vibration Energy Harvester
Vibration-based energy harvesting via microelectromechanical system- (MEMS-) scale devices presents numerous challenges due to difficulties in maximizing power output at low driving frequencies. This work investigates the performance of a uniquely designed microscale bistable vibration energy harvester featuring a central buckled beam coated with a piezoelectric layer. In this design, the central beam is pinned at its midpoint by using a torsional rod, which in turn is connected to two cantilever arms designed to induce bistable motion of the central buckled beam. The ability to induce switching between stable states is a critical strategy for boosting power output of MEMS. This study presents the formulation of a model to analyze the static and dynamic behaviors of the coupled structure, with a focus on the evolution of elongation strain within the piezoelectric layer. Cases of various initial buckling stress levels, driving frequencies, and driving amplitude were considered to identify regimes of viable energy harvesting. Results showed that bistable-state switching, or snap-through motion of the buckled beam, produced a significant increase in power production potential over a range of driving frequencies. These results indicate that optimal vibration scavenging requires an approach that balances the initial buckling stress level with the expected range of driving frequencies for a particular environment.
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- Award ID(s):
- 1408005
- PAR ID:
- 10091622
- Date Published:
- Journal Name:
- Shock and Vibration
- Volume:
- 2019
- ISSN:
- 1070-9622
- Page Range / eLocation ID:
- 1 to 10
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1155/2019/6743676
