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A recently reported vision ray metrology technique [Opt. Express29,43480(2021)OPEXFF1094-408710.1364/OE.443550] measures geometric wavefronts with high precision. This paper introduces a method to convert these wavefront data into height information, focusing on the impact of back surface flatness and telecentricity errors on measurement accuracy. Systematic errors from these factors significantly affect height measurements. Using ray trace simulations, we estimate reconstruction errors with various plano-concave and plano-convex elements. We also developed a calibration technique to mitigate telecentricity errors, achieving submicron accuracy in surface reconstruction. This study provides practical insights into vision ray metrology systems, highlighting validity limits, emphasizing the importance of calibration for larger samples, and establishing system alignment tolerances. The reported technique for the conversion of geometric wavefronts to surface topography employs a direct non-iterative ray-tracing-free method. It is ideally suited for reference-free metrology with application to freeform optics manufacturing.
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Sensitivity study of transverse translation diverse phase retrieval for freeform metrology
Transverse translation-diverse phase retrieval (TTDPR), a ptychographic wavefront-sensing technique, is a viable method for optical surface metrology due to its relatively simple hardware requirements, flexibility, and high demonstrated accuracy in other fields. In TTDPR, a subaperture illumination pattern is scanned across an optic under test, and the reflected intensity is gathered on an array detector near focus. A nonlinear optimization algorithm is used to reconstruct the wavefront aberration at the test surface, from which we can solve for surface error, using intensity patterns from multiple scan positions. TTDPR is an advantageous method for aspheric and freeform metrology, because measurements can be performed without null optics. We report on a sensitivity analysis of TTDPR using simulations of a freeform concave mirror measurement. Simulations were performed to test TTDPR algorithmic performance as a function of various parameters, including detector SNR and position uncertainty of the illumination.
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- PAR ID:
- 10097965
- Date Published:
- Journal Name:
- Optical Manufacturing and Testing XII
- Volume:
- 10742
- Page Range / eLocation ID:
- 31
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1117/12.2321212
