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Title: Dielectrophoresis-driven Assembly of Polymer Microbeads and Carbon Nanotubes Upon Fabricated Carbon Microelectrodes
Microparticulates placed in non-uniform electric field experience dielectrophoretic forces that can be utilized for the guided assembly of microparts. The presented study discusses two types of such guided micro-assemblies. We observe the self-assembly of carbon nanotubes (CNTs) into the conductive bridges between microelectrodes along the field lines. These conductive bridges are later fixed in place by the layer of electrodeposited conductive polymer Polypyrrole (PPy). Additionally, we report on using positive dielectrophoresis (pDEP) to attract polymer microbeads to the windows opened in the SU-8 photoresist on top of the microelectrodes. The electric field is getting shielded by the photoresist and thus the beads are attracted only to the bare electrodes opened in the photoresist via standard lithographic process. Presented techniques open new possibilities for the guided assembly of micro-components for sensors, actuators, microelectromechanical systems (MEMs), as well as for micro- and nano-electronic devices.  more » « less
Award ID(s):
1661877
PAR ID:
10110020
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Proceedings of the World Congress of Micro- and NanoManufacturing
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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