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As miniaturization of electrical and mechanical components used in modern technology progresses, there is an increasing need for high-throughput and low-cost micro-scale assembly techniques. Many current micro-assembly methods are serial in nature, resulting in unfeasibly low throughput. Additionally, the need for increasingly smaller tools to pick and place individual microparts makes these methods cost prohibitive. Alternatively, parallel self-assembly or directed-assembly techniques can be employed by utilizing forces dominant at the micro and nano scales such as electro-kinetic, thermal, and capillary forces. However, these forces are governed by complex equations and often act on microparts simultaneously and competitively, making modeling and simulation difficult. The research in this paper presents a novel phenomenological approach to directed micro-assembly through the use of artificial intelligence to correlate micro-particle movement via dielectrophoretic and electro-osmotic forces in response to varying frequency of an applied non-uniform electric field. This research serves as a proof of concept of the application of artificial intelligence to create high yield low-cost micro-assembly techniques, which will prove useful in a variety of fields including micro-electrical-mechanical systems (MEMS), biotechnology, and tissue engineering. 

The subject of healing and repair of damaged microelectrodes has become of particular interest as the use of integrated circuits, energy storage technologies, and sensors within modern devices has increased. As the dimensions of the electrodes shrink together with miniaturization of all the elements in modern electronic devices, there is a greater risk of mechanical-, thermal-, or chemical-induced fracture of the electrodes. In this research, a novel method of electrode healing using electrokinetically assembled carbon nanotube (CNT) bridges is presented. Utilizing the previously described step-wise CNT deposition process, conductive bridges were assembled across ever-larger electrode gaps, with the width of electrode gaps ranging from 20 microns to well over 170 microns. This work represents a significant milestone since the longest electrically conductive CNT bridge previously reported had a length of 75 microns. To secure the created conductive CNT bridges, they are fixed with a layer of electrodeposited polypyrrole (a conductive polymer). The resistance of the resulting CNT bridges, and its dependence on the size of the electrode gap, is evaluated and explained. Connecting electrodes via conductive CNT bridges can find many applications from nanoelectronics to neuroscience and tissue engineering. 

Abstract Dielectrophoresis (DEP) is a force applied to microparticles in nonuniform electric field. This study discusses the fabrication of the glassy carbon interdigitated microelectrode arrays using lithography process based on lithographic patterning and subsequent pyrolysis of negative SU-8 photoresist. Resulting high-resistance electrodes would have the regions of high electric field at the ends of microarray as demonstrated by simulation. The study demonstrates that combining the alternating current (AC) applied bias with the direct current (DC) offset allows the user to separate subpopulations of microparticulates and control the propulsion of microparticles to the high field areas such as the ends of the electrode array. The direction of the movement of the particles can be switched by changing the offset. The demonstrated novel integrated DEP separation and propulsion can be applied to various fields including in vitro diagnostics as well as to microassembly technologies. 

Carbon Nanotube (CNT) agglomerates can be aligned along field lines between adjacent electrodes to form conductive bridges. This study discusses the step-wise process of dielectrophoretic deposition of CNTs to form conducting bridges between adjacent electrodes. For the first time, the creation of conductive CNT bridges spanning lengths over 50 microns is demonstrated. The CNT bridges are permanently secured using electrodeposition of the conducting polymer polypyrrole. Morphologies of the CNT bridges formed within a frequency range of 1 kHz and 10 MHz are explored and explained as a consequence of interplay between dielectrophoretic and electroosmotic forces. Postdeposition heat treatment increases the conductivity of CNT bridges, likely due to solvent evaporation and resulting surface tension inducing better contact between CNTs. 

Dielectrophoresis is a force applied to microparticles in non-uniform electric field. The presented study discusses the fabrication of the glassy carbon interdigitated microelectrode arrays using lithography process based on lithographic patterning and subsequent pyrolysis of negative SU-8 photoresist. Resulting high resistance electrodes would have the regions of high electric field at the ends of microarray as demonstrated by simulation. The study demonstrates that combining the AC applied bias with the DC offset allows the user to separate sub-populations of microparticulates and control the propulsion of microparticles to the high field areas such as the ends of the electrode array. The direction of the movement of the particles can be switched by changing the offset. The demonstrated novel integrated DEP separation and propulsion can be applied to various fields including in-vitro diagnostics as well as to microassembly technologies. 

Microparticulates placed in non-uniform electric field experience dielectrophoretic forces that can be utilized for the guided assembly of microparts. The presented study discusses two types of such guided micro-assemblies. We observe the self-assembly of carbon nanotubes (CNTs) into the conductive bridges between microelectrodes along the field lines. These conductive bridges are later fixed in place by the layer of electrodeposited conductive polymer Polypyrrole (PPy). Additionally, we report on using positive dielectrophoresis (pDEP) to attract polymer microbeads to the windows opened in the SU-8 photoresist on top of the microelectrodes. The electric field is getting shielded by the photoresist and thus the beads are attracted only to the bare electrodes opened in the photoresist via standard lithographic process. Presented techniques open new possibilities for the guided assembly of micro-components for sensors, actuators, microelectromechanical systems (MEMs), as well as for micro- and nano-electronic devices. 

The present study compares fluid velocity magnitude and direction for three different glassy carbon electrode systems affecting AC electroosmotic pumping. The flow behavior is analyzed for electroosmotic pumping performed with asymmetric coplanar electrodes. Subsequently, effects of adding microposts array of two different heights (40 μm and 80 μm) are studied. Experimental results demonstrate that as peak-to-peak voltage is increased above 10V peak-to-peak, the flow reversal is achieved for planar electrodes. Utilization of microposts-enhanced asymmetric electrodes blocks the flow reversal and alters the magnitude of the fluid velocity at the application of larger voltages (above 10V peak-to-peak). Understanding of the consequences of three-dimensional geometry of asymmetric electrodes would allow designing the electrode system for AC electroosmotic pumping for electroosmotic mixing and bi-directional pumping with equal forward and backward flow velocities.