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Title: High-precision local transfer of van der Waals materials on nanophotonic structures

Prototyping of van der Waals materials on dense nanophotonic devices requires high-precision monolayer discrimination to avoid bulk material contamination. We use the glass transition temperature of polycarbonate, used in the standard dry transfer process, to draw an in situ point for the precise pickup of two-dimensional materials. We transfer transition metal dichalcogenide monolayers onto a large-area silicon nitride spiral waveguide and silicon nitride ring resonators to demonstrate the high-precision contamination-free nature of the modified dry transfer method. Our improved local transfer technique is a necessary step for the deterministic integration of high-quality van der Waals materials onto nanocavities for the exploration of few-photon nonlinear optics on a high-throughput, nanofabrication-compatible platform.

 
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Award ID(s):
1845009
NSF-PAR ID:
10132539
Author(s) / Creator(s):
; ; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optical Materials Express
Volume:
10
Issue:
2
ISSN:
2159-3930
Page Range / eLocation ID:
Article No. 645
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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