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Title: Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning
The construction of a complex, 3D optical metamaterial challenges conventional nanofabrication techniques. These metamaterials require patterning of both a deformable mechanical substrate and an optically-active structure with ∼200 nm resolution and precision. The soft nature of the deformable mechanical materials often precludes the use of resist-based techniques for patterning. Furthermore, FIB deposition approaches produce metallic structures with considerable disorder and impurities, impairing their optical response. In this paper we discuss a novel solution to this nanofabrication challenge – the integration of direct laser writing and MEMS stencil patterning. We demonstrate a variety of methods that enable this integration and then show how one can produce optically-active, 3D metamaterials. We present optical characterization data on one of these metamaterials to demonstrate the viability of our nanofabrication approach.  more » « less
Award ID(s):
1647837
PAR ID:
10134060
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
Nanoscale
Volume:
11
Issue:
7
ISSN:
2040-3364
Page Range / eLocation ID:
3261 to 3267
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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